International Journal of Engineering and Technology

In this paper we present design and analysis of RF MEMS switches with crab-leg connection beam structures. The mechanical characteristics of switch including pull down voltage, hysteresis analysis and capacitance between beam and center conductor are studied. RF characterization of the switch including insertion loss, return loss and isolation are also investigated. Measurement results show that pull down voltage of the design is 17.5V. The mechanical design and analysis of the switch is performed using finite element method with coventorware software.