International Journal of Engineering and Technology

Sensitivity is an important element of a sensing process, and it is part of the open-loop gain of the sensor. This makes it a strong inverse relationship between sensitivity and bandwidth for any class of sensors. The geometrical of the accelerometer, mass width, beam (length and width) of the device and its sensitivity are analyzed theoretically and also using finite element analysis software, COMSOL Multiphysics®. Hence, the optimization analysis concluded that desired sensitivity can be achieved by adding number of fingers and adjusting the length of the beam. Preliminary results show that the sensitivity of the device increases by significantly by 38%.