International Journal of Engineering and Technology

Sensors are becoming one of the inextricable parts of the human life. MEMS technology made this sensors error free and with overcoming the boundary of classical sensors. Pressure sensors are plays key role in many disciplines. Here in this paper we were designed and simulated capacitive pressure sensor with non-identical diaphragm structure with different measurements. We are using silicon as the material for the diaphragm because of its unique properties. In the design circular design has radius 36 um and the square with and keeping the areas of all designs are unique. The entire simulation is done using COMSOL multi physics.